DLC Coating Units

PLATIT's DLC Machines

Most important Features:

Combined PVD & PECVD process - to deposit very smooth coatings

Special Si containing gas line - controlled by additional Mass Flow Controller

• Silicon increases heat resistance
• Silicon decreases internal stress of the coating
• Silicon improves adhesion -> thick DLC coatings are possible

BIAS supply 350 kHz - to enable deposition of non-conductive layers.

Special heaters with dust filter

• grids in front of the heaters
• to avoid contamination of the substrates by dust released from the heaters

VIRTUAL SHUTTER^® to clean the target to the back before deposition.

Mechanical TUBE SHUTTERS^® to protect targets

• against contamination by acetylene
• against being coated when idle

The standard machines pi111, pi300 and PL1001 (produced after January 2009) ared upgradeable with the neccessary features to deposit the 2 generation of DLC-coatings