The 6π Advantages

 

 

1. Optimum Adhesion with
Virtual Shutter® due to:

 

  • turnable magnetic field without sensitive mechanical elements
  • to the back for fast target cleaning
  • to the substrates for smooth deposition

 

 

 

6. Maximum effective target width:

  • d x π due to the cylindrical rotating cathodes

2. Smooth coating surface with
minimized droplets due to:

 

  • Virtual Shutter®
  • fast ARC track motion
  • at consistent target erosion

3. Nanocomposite deposition due to:

  • highly ionized plasma with
  • high magnetic field intensity
  • with 2 phases, e.g.:
    • (nc-TiAlN) / (a-Si3N4) or
    • (nc-CrAlN) / (a-Si3N4)

5. Multi- and nanolayers in ultracompact units due to:

 

  • optimum space usage by cylindrical, rotating cathodes on the side

 

4. Programmable Stoichiometry and deposition of:

 

  • gradient coatings consisting of different coating types
  • without changing the low-cost targets, e.g. from pure Ti, Al, AlSi

 

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