X-Ray Spectrometer

Advantages

• Non-destructive coating thickness measurement
• Non-destructive composition measurement
• Non-destructive cobalt leaching measurement

Limitations

• Potassium (K, Kalium) is the lightest detecable element
• Al, Si, N, … not detectable
• Measuring chamber size (L x W x H): 360 x 380 x 240 mm

Method

• X-rays animate the substrate to emit X-ray fluorescence
• The analysis is focused on a small spot of 0.3 μm
• The penetration depth is about 40 - 50 μm (for HSS)