Due to its modular design and the range of available technologies, Pi411 PLUS is the world’s most flexible coating unit. Its basic configuration as an ARC unit with three rotating cathodes inside the door, can be modularly upgraded on-site with an ARC or a SPUTTER central cathode as well as with PECVD and OXI processes. Unique to this unit is also the availability of the LACS® hybrid technology, which allows simultaneous deposition of coatings using both ARC and SPUTTER.
The broad variety of configuration options as well as the flexibility made possible by the rotating cathodes, enables the development of customer-specific coatings with the highest performance. Thus, this coating unit addresses customers who are seeking maximum flexibility with full range of coating technologies easily accessible in one machine.
Basic configuration with 3 x LARC® (LAteral Rotating Cathode) inside the door for ARC deposition
For a-C:H:X respectively a-C:H:Si coatings
ECO + CERC® (Central Rotating Cathode) with ARC technology to increase productivity and enable most complex coatings
For oxide coatings in corundum structure
High performance SPUTTERED Coating Induced by Lateral Glow Discharge from the central cathode
Simultaneous ARC & SPUTTER processes with LARC® inside the door and central SCIL® cathode