PLATIT Pi411 G3 – for unlimited flexibility
With its modular design and wide range of available technologies, the PLATIT Pi411 G3 is the most flexible PVD coating unit in the world. The basic configuration as an ARC coating unit with three rotating cathodes in the door can be modularly adapted on site. It can be upgraded with an ARC or SPUTTERING central cathode, as well as PECVD, and OXI processes. Also unique to the coating unit is the LACS® hybrid technology, which allows to coat simultaneously using ARC and SPUTTER technologies.
Multiple configuration options and the high flexibility based on the rotating cathodes allow you to develop customized PVD coatings at the highest level of performance. This coating unit is therefore the ideal choice for customers who do not want to make any technological compromises and value maximum flexibility and performance.
Technology
The PLATIT Pi411 G3 PVD coating unit offers you several technology options to choose from:
ECO
Basic configuration: 3 LARC (LAteral Rotating Cathode) cathodes in the door for ARC coating
LARC RM (Rotating Magnetron)
Integrated SPUTTERING cathode in the door enables complementary deposition steps and compact system design for multy-process flexibilty.
SCIL
High-performance SPUTTERING from the central cathode
FMS (Focused Magnetron SPUTTERING)
High-density SPUTTERING from the central cathode with enhanced coating performance and efficiency.
Hybrid LACS
Simultaneous ARC and SPUTTER processes with LARC AMF cathodes in the door and central SCIL cathode
PECVD (DLC2)
For a-C:H:Si coatings
OXI
For oxide PVD coatings with a corundum structure
Etching processes
Several etching technologies can be used with the PLATIT Pi411 G3 coating unit, offering various advantages:
- LGD (Lateral Glow Discharge)
- Plasma etching with argon, glow discharge
- Metal ion etching (Ti, Cr)
Load and cycle times
- Coating volume: max. ø540 x H500mm
- Coating height with defined coating thickness: max. 400 mm (ECO), 345 mm (SCIL), 420 mm (FMS)
- Load: max. 200kg
- Batches/day: 4-5
Modular carousel systems
- 1 to 14 axes
Software
- PLATIT SmartSoftware (PC and PLC system)
- Easy operation and maintenance
- Modern user interface with menu navigation on touch screen
- Real-time process visualization incl. data recording and data management
- Manual and automatic process control
- Remote diagnosis and maintenance possible
Dimensions
- Footprint: 2950 x 1900 x 2400mm (W x D x H)